JPH067292Y2 - 平行光による真直度測定装置 - Google Patents
平行光による真直度測定装置Info
- Publication number
- JPH067292Y2 JPH067292Y2 JP10071087U JP10071087U JPH067292Y2 JP H067292 Y2 JPH067292 Y2 JP H067292Y2 JP 10071087 U JP10071087 U JP 10071087U JP 10071087 U JP10071087 U JP 10071087U JP H067292 Y2 JPH067292 Y2 JP H067292Y2
- Authority
- JP
- Japan
- Prior art keywords
- block
- measured
- guide
- groove
- parallel light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 title description 3
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10071087U JPH067292Y2 (ja) | 1987-06-30 | 1987-06-30 | 平行光による真直度測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10071087U JPH067292Y2 (ja) | 1987-06-30 | 1987-06-30 | 平行光による真直度測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS646506U JPS646506U (en]) | 1989-01-13 |
JPH067292Y2 true JPH067292Y2 (ja) | 1994-02-23 |
Family
ID=31329030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10071087U Expired - Lifetime JPH067292Y2 (ja) | 1987-06-30 | 1987-06-30 | 平行光による真直度測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH067292Y2 (en]) |
-
1987
- 1987-06-30 JP JP10071087U patent/JPH067292Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS646506U (en]) | 1989-01-13 |
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